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You are aware that ASML is a small company prior to EUV?

And they only allocated a small number of employees and resources to bring their first EUV machine to market?

ASML had 7,685 employees prior to their EUV success (Including contracts), of these 7,685 employees only 2500 were engineers. ASML put half of these engineers to develop the NXE:3100 and they only spent 10 billion dollars.

So total resources = 1250 engineers, 10 billion to make EUV a reality and 13 years.

So yes the complexity and difficulty of EUV machines is vastly overstated. The amount of resources spent on it is coins found in couch cushions to huge mega corps.

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