Comment on ASML unveils EUV light source advance that could yield 50% more chips by 2030parentComments−itishappy6moStochastic effects become a bigger and bigger problem. At some point (EUV) a single photon has enough energy to ionize atoms, causing a cascade that causes effects to bloom outside of the illumination spot.
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Stochastic effects become a bigger and bigger problem. At some point (EUV) a single photon has enough energy to ionize atoms, causing a cascade that causes effects to bloom outside of the illumination spot.