Comment on ASML unveils EUV light source advance that could yield 50% more chips by 2030parentComments−m4rtink6moIIRC from the Veritasium video[0] there is actually some hydrogen gas flowing at quite a high speed though the laser chamber to carry away the tin debris so that it does not accumulate on the mirrors.[0] https://www.youtube.com/watch?v=MiUHjLxm3V0−greggsy6moThey account to every single tiny atom somehow too, but I think I fell asleep last time I watched the video.
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IIRC from the Veritasium video[0] there is actually some hydrogen gas flowing at quite a high speed though the laser chamber to carry away the tin debris so that it does not accumulate on the mirrors.
[0] https://www.youtube.com/watch?v=MiUHjLxm3V0
They account to every single tiny atom somehow too, but I think I fell asleep last time I watched the video.