Had a longer answer here, but managed to delete it.
In short: Stanford stands out in my mind as head-and-shoulders above the rest. After that, UC Berkeley.
If you shift to engineering (moreso than an entrepreneurship focus) MIT and Carnegie Mellon both have programs with good reputations.
Princeton, Harvard, and Yale also have great reputations, but I'm not sure how much of that comes from entrepreneurship in particular, and how much is just from their Ivy League aura in general.
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Had a longer answer here, but managed to delete it.
In short: Stanford stands out in my mind as head-and-shoulders above the rest. After that, UC Berkeley.
If you shift to engineering (moreso than an entrepreneurship focus) MIT and Carnegie Mellon both have programs with good reputations.
Princeton, Harvard, and Yale also have great reputations, but I'm not sure how much of that comes from entrepreneurship in particular, and how much is just from their Ivy League aura in general.