That's a good start.

Different applications would probably use different scores, based on a table of numbers.

+++

Count of transistors within a single layer (E.G. what's linked above)

Count of transistors within a 3d volume

Performance (flops? some other standard?) of that volume under various thermal conditions, power constraints, etc.

Latency at (the pins and) edges during the common test pattern (during the above profile slots).

Efficiency: how much power is consumed in the above states.

Weight; sometimes it matters, this should be measured and published even if it isn't used in the score.