The exhaust lines on high-energy implanters (the ones that do P doping) are a treat. They get coated up with deposits of solid phosphorus. If accidentally exposed to atmosphere, they do what phosphorus does. We used to call it "unscheduled exhaust system PM." Medium and high current implanters where I worked accumulated arsenic in the exhaust system, but at least that doesn't explode on you.
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And then you have Phosphene gas used to dope silicon, where people have died changing empty supply tanks.
The exhaust lines on high-energy implanters (the ones that do P doping) are a treat. They get coated up with deposits of solid phosphorus. If accidentally exposed to atmosphere, they do what phosphorus does. We used to call it "unscheduled exhaust system PM." Medium and high current implanters where I worked accumulated arsenic in the exhaust system, but at least that doesn't explode on you.