Geeze, I though you needed a clean room to do this kind of work. I guess, being a hobby, with less concern for effort, loss of product, or cost versus profit, one might summon the will to try, try again, when confronted with botched fabrication runs.
Even with millimeter-scale components, I'd still think dust and debris could be a real problem. Is it just that 12 hour runs are short enough to just accept an imperfect production output, since it's a personal project, or is dust not as big a deal at this scale as I'd imagine?
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Geeze, I though you needed a clean room to do this kind of work. I guess, being a hobby, with less concern for effort, loss of product, or cost versus profit, one might summon the will to try, try again, when confronted with botched fabrication runs.
Even with millimeter-scale components, I'd still think dust and debris could be a real problem. Is it just that 12 hour runs are short enough to just accept an imperfect production output, since it's a personal project, or is dust not as big a deal at this scale as I'd imagine?
You do not need a cleanroom, just some laminar airflow to prevent dust contamination. That is easy to achieve with a bunch of fans and lab clothing.
Static electricity damage is prevented by grounding everything. (Important during lithography.)
The hard part is getting a reliable plasma oven and the requisite chemicals plus running the process to reliability.
The smaller you go the more worried you should be about dust, and particles. Also the more layers to your process. Also no mention of yield.